Roll-to-Roll Vacuum Deposition Apparatus
This is the best small-size roll-to-roll deposition apparatus for experimental research.
Specifications
| Deposition Method | DC magnetron sputtering (optionally supports RF) |
|---|---|
| Substrate conveyor | Roll-to-roll (with tension control) Speed: 0.2-3.0 m/min Tension: 15-80 N |
| Length of Roller Face | 140 mm |
| Film Dimensions | Maximum width: 100 mm × Length: 100 m (Film thickness: 50μm) |
| Vacuum Chamber | Width: 360 × Height: 400 × Depth: 300 (Inner dimensions; mm) |
| Exhaust System | Turbomolecular pump + Rotary Pump |
| Ultimate Pressure | 1*10-4 Pa (Without substrate) |
| Vacuum Gauge | Pirani gauge and broadband ionization vacuum gauge |
| Gas Injection System | Massflow controller (AR/O2 per line) |
| Operation System | Manual operation |
| Utility | Power supply: 3-phase 200V*40A; Water cooling: 15L/MIN at 25°C or less (2kgf/cm2; a booster pump is optional if the water pressure is low) |