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In-house Development

Roll-to-Roll Vacuum Deposition Apparatus

This is the best small-size roll-to-roll deposition apparatus for experimental research.

Roll-to-Roll Vacuum Deposition Apparatus
Entire Apparatus
Dimensions
Dimensions
Apparatus Configuration
Apparatus Configuration
Internal Structure of Apparatus
Internal Structure of Apparatus

Specifications

Deposition Method DC magnetron sputtering (optionally supports RF)
Substrate conveyor Roll-to-roll (with tension control)
Speed: 0.2-3.0 m/min
Tension: 15-80 N
Length of Roller Face 140 mm
Film Dimensions Maximum width: 100 mm × Length: 100 m (Film thickness: 50μm)
Vacuum Chamber Width: 360 × Height: 400 × Depth: 300 (Inner dimensions; mm)
Exhaust System Turbomolecular pump + Rotary Pump
Ultimate Pressure 1*10-4 Pa (Without substrate)
Vacuum Gauge Pirani gauge and broadband ionization vacuum gauge
Gas Injection System Massflow controller (AR/O2 per line)
Operation System Manual operation
Utility Power supply: 3-phase 200V*40A; Water cooling: 15L/MIN at 25°C or less (2kgf/cm2; a booster pump is optional if the water pressure is low)